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AMHS Total Solution
In Semiconductor Manufacturing
Catalogue
AMHS Transport Equipment
Overhead Hoist Transport（OHT）
Conveyor
Autonomous Robot（AMR）
AMHS Storage Purge Equipment
Foup/Pod Stocker
Reticle Stocker
Tower Stocker
Near Tool Buffer
Tool Loadport Station(TLP)
OHB Purge(OHBP)
Reticle Cabinet
Wafer Cassette Load Port Station(LPS)
E-Rack
AMHS Software System
AMHS Material Control System
AMHS Analysis & Monitoring System
AMHS Sensor Control
RFID Reader
SmartTag Reader
E84 Sensor
AMHS Storage Purge Equipment
Foup/Pod Stocker
Foup/Pod
Product Details
Reticle Stocker
Reticle
Product Details
Tower Stocker
Product Details
Near Tool Buffer
Foup/Pod
Product Details
Tool Loadport Station(TLP)
N₂/XCDA
Product Details
OHB Purge(OHBP)
Foup/Pod/Reticle
Product Details
1
2
Purchase
Consultation
+8621 5689 0890
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PRODUCTS
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NEWSROOM
ABOUT
Tel：
400-099-6116
Email：
info@lvdiquche.com
Address：
No. 588-1, Feidu Road, Lingang New Area, Pilot Free Trade Zone, Shanghai, China
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HOME
PRODUCTS
CUSTOMER SUPPORT
NEWSROOM
ABOUT
Company Profile
Quality and Reliability
ESG Strategy
Careers
Contact Us
400-099-6116
info@lvdiquche.com
Website Map
|
Legal Statement
|
Technical Support
Copyright © 2023 MeetFuture Technology (Shanghai) Co., Ltd. 沪ICP备18010042号-2
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